JPH0158663U - - Google Patents
Info
- Publication number
- JPH0158663U JPH0158663U JP15410087U JP15410087U JPH0158663U JP H0158663 U JPH0158663 U JP H0158663U JP 15410087 U JP15410087 U JP 15410087U JP 15410087 U JP15410087 U JP 15410087U JP H0158663 U JPH0158663 U JP H0158663U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- vapor deposition
- evaporation sources
- thickness monitors
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154100U JPH0538052Y2 (en]) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154100U JPH0538052Y2 (en]) | 1987-10-09 | 1987-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158663U true JPH0158663U (en]) | 1989-04-12 |
| JPH0538052Y2 JPH0538052Y2 (en]) | 1993-09-27 |
Family
ID=31430529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987154100U Expired - Lifetime JPH0538052Y2 (en]) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538052Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5326356U (en]) * | 1976-08-13 | 1978-03-06 |
-
1987
- 1987-10-09 JP JP1987154100U patent/JPH0538052Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5326356U (en]) * | 1976-08-13 | 1978-03-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538052Y2 (en]) | 1993-09-27 |